Multi-chip heterogeneously integrated array of active three-terminal transistor lasers and passive photonic structures for electronic-photonic integration on silicon
spiedigitallibrary.org
Multi-chip heterogeneously integrated array of active three-terminal transistor lasers and passive photonic structures for electronic-photonic integration on silicon
An array of active photonic devices is fabricated in unison after a heterogeneous integration process first metal-eutectically bonds these distinct materials as a distribution onto a silicon host wafer. The patterning out of heterogeneous materials followed by the formation of all photonic devices allows for wide-area fine-alignment without the ...
Feb 26, 2020
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