Abstract: The effects of slow wave and dielectric quasi-TEM modes due to MIS (Metal-Insulator-Semiconductor) structure TSV (Through-Silicon-Via) are analyzed by using the proposed MIS TSV model and ...
Abstract: This article describes the first-order perturbation analysis of nonlinear responses in surface acoustic wave (SAW) resonators on the LiTaO3/SiO2/Si structure, where bulk wave radiation is ...