Thin film technology focuses on the deposition and analysis of functional material layers on a substrate. These layers are essential building blocks in modern devices, like the microchips found in ...

High power magnetron sputtering techniques have become essential tools in the deposition of advanced thin films. By utilising high power pulses, these methods generate highly ionised plasmas that ...

Able to meet the cathode voltage and power requirements for dc magnetron sputtering sources, the 600-W EK Series and 1.2-kW EQ Series with sputtering option provide from 0 to 800 W at 750 mA or 1.5 A, ...

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